Abstract

Microchannel are very important for microfluidic devices because they carry liquid or fluid quantities, aiming to realize biochemical micro reactions, IC cooling, etc. The most of microfluidic devices used until now bulk micromachining technologies to fabricate microchannels, microchambers, involving high temperature bonding processes. So, the material cost is enough expensive because one extra wafer is needed to encapsulate the microfluidic system. In this paper, two low temperatures. IC compatible technological processes for microchannels based microfluidic devices fabrication are described. Arrays of microchannels and microfluidic devices (comprising also microchambers/microalveoli) have been fabricated on silicon, or other substrates