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Controlling electron beam induced deposition of iron from... | ResearchHub
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Controlling electron beam induced deposition of iron from Fe(CO)5: Inhibition of autocatalytic growth by NH3 and reactivation by electron irradiation
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Authors
Petra Martinović
3 more
Petra Martinović
•
Lars Barnewitz
1 more
•
Petra Swiderek
Published
April 13, 2023
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Journal
Journal of vacuum science & technology
Topics
Physics
Materials Science
Chemistry
Engineering
Quantum Mechanics
Show all topics
DOI
https://doi.org/10.1116/6.0002306
