Controlling electron beam induced deposition of iron from Fe(CO)5: Inhibition of autocatalytic growth by NH3 and reactivation by electron irradiation

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Journal

Journal of vacuum science & technology

Topics

Materials Science

Quantum Mechanics

Nuclear Physics

Chemical Engineering

Organic Chemistry

Physical Chemistry

Physics

Materials Science

Chemistry

Engineering

Quantum Mechanics

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DOI

https://doi.org/10.1116/6.0002306