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Subnanometer Linewidth Uniformity in Silicon Nanophotonic... | ResearchHub
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Subnanometer Linewidth Uniformity in Silicon Nanophotonic Waveguide Devices Using CMOS Fabrication Technology
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Authors
Shankar Selvaraja
•
Wim Bogaerts
2 more
•
Roel Baets
Published
November 17, 2009
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Journal
IEEE Journal of Selected Topics in Quantum Electronics
Topics
Physics
Materials Science
Medicine
Optics
Pathology
Show all topics
DOI
10.1109/jstqe.2009.2026550
