Paper
Paper
Search...
Search ResearchHub...
Ctrl+K
New
Home
Browse
Earn
Fund
RH Journal
Notebook
Lists
Leaderboard
RSC
USD
Changelog
Terms
Privacy
Issues
Docs
Support
Foundation
About
Subnanometer Linewidth Uniformity in Silicon Nanophotonic... | ResearchHub
Paper
Paper
Search...
Search ResearchHub...
Ctrl+K
New
Home
Browse
Earn
Fund
RH Journal
Notebook
Lists
Leaderboard
RSC
USD
Changelog
Terms
Privacy
Issues
Docs
Support
Foundation
About
Subnanometer Linewidth Uniformity in Silicon Nanophotonic Waveguide Devices Using CMOS Fabrication Technology
0
Authors
Shankar Selvaraja
•
Wim Bogaerts
2 more
•
Roel Baets
Published
November 17, 2009
Paper
Conversation
0
Reviews
0
Bounties
0
Sign in to review
Share your thoughts on this paper...
Best
Supporters
Support the authors with ResearchCoin
Tip RSC
Journal
IEEE Journal of Selected Topics in Quantum Electronics
Topics
Physics
Materials Science
Medicine
Optics
Pathology
Show all topics
DOI
10.1109/jstqe.2009.2026550
